From Prototype to Production: Scaling a Custom Wafer Heater Project

https://thermal-design-insights.trexgame.net/wafer-heater-materials-and-construction-what-engineers-should-know

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result